Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material

Mankelevivh, Yu.A.Yu.A.MankelevivhBraginsky, O.VO.VBraginskyKovalev, A.S.A.S.KovalevLopaev, D.V.D.V.LopaevMalykhin, E.M.E.M.MalykhinRakhimova, T.V.T.V.RakhimovaRakhimov, A.T.A.T.RakhimovVasilieva, A.N.A.N.VasilievaZyryanov, S.MS.MZyryanovBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17568Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous materialMeeting abstract