Mask 3D effect mitigation by source optimization and assist feature placement

Van Look, LieveLieveVan LookMochi, IacopoIacopoMochiPhilipsen, VickyVickyPhilipsenGallagher, EmilyEmilyGallagherHendrickx, EricEricHendrickxMcIntyre, GregGregMcIntyreWittebrood, FrisoFrisoWittebroodLyakhova, KaterynaKaterynaLyakhovade Winter, LaurensLaurensde WinterLast, ThorstenThorstenLastFliervoet, TimonTimonFliervoetSchiffelers, GuidoGuidoSchiffelersFinders, JoJoFindersVan Adrichem, PaulPaulVan AdrichemLyons, AdamAdamLyonsLaenens, BartBartLaenensLiddle, JackJackLiddleNeumann, Jens TimoJens TimoNeumann2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27476Mask 3D effect mitigation by source optimization and assist feature placementProceedings paper