Fujikawa, MakotoMakotoFujikawaYamaguchi, TatsuyaTatsuyaYamaguchiNozawa, S.S.NozawaKikuchi, Y.Y.KikuchiMaekawa, KaoruKaoruMaekawaKawasaki, H.H.KawasakiChanson, RomainRomainChansonde Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-272021-10-2720190894-6507https://imec-publications.be/handle/20.500.12860/32995Novel volatile film for the protection of organo-silicate glass dielectric materialsJournal articlehttps://ieeexplore.ieee.org/document/8846871