Low-loss single-mode waveguides operating at UV/violet wavelengths and fabricated with contact optical lithography

Lin, ChupaoChupaoLinSchaubroeck, DavidDavidSchaubroeckRoelkens, GuntherGuntherRoelkensBaets, RoelRoelBaetsLe Thomas, NicolasNicolasLe Thomas2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35482Low-loss single-mode waveguides operating at UV/violet wavelengths and fabricated with contact optical lithographyProceedings paper