A CMOS compatible carbon nanotube growth approach

Cott, DaireDaireCottChiodarelli, NicoloNicoloChiodarelliVereecken, PhilippePhilippeVereeckenVereecke, BartBartVereeckeVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16909A CMOS compatible carbon nanotube growth approachMeeting abstract