Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness

Van den Berg, JaapJaapVan den BergReading, MichaelMichaelReadingBailey, PaulPaulBaileyNoakes, TimTimNoakesAdelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciTielens, HildeHildeTielensConard, ThierryThierryConardDe Gendt, StefanStefanDe GendtVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-2120130169-4332https://imec-publications.be/handle/20.500.12860/23227Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thicknessJournal articlehttp://www.sciencedirect.com/science/article/pii/S0169433213002961