Photo-responsive oligo(dimethylsiloxane) liquid crystals for defect-free nano-patterning at the sub-5 nm scale

Nickmans, K.K.NickmansMurphy, J.J.MurphyDe Waal, B.B.De WaalLeclere, P.P.LeclereSanchez Somolinos, C.C.Sanchez SomolinosDoise, JanJanDoiseGronheid, RoelRoelGronheidBroer, D.D.BroerSchenning, A.A.Schenning2021-10-232021-10-2320160935-9648https://imec-publications.be/handle/20.500.12860/27076Photo-responsive oligo(dimethylsiloxane) liquid crystals for defect-free nano-patterning at the sub-5 nm scaleJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/adma.201602891/full