Al2O3 surface passivation characterized on hydrophobic and hydrophilic c-Si by a combination of QSSPC, CV, XPS and FTIR

Goverde, HansHansGoverdeVermang, BartBartVermangMorato, AlessandroAlessandroMoratoJohn, JoachimJoachimJohnHorzel, JörgJörgHorzelMeneghesso, GaudenzioGaudenzioMeneghessoPoortmans, JefJefPoortmans2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20746Al2O3 surface passivation characterized on hydrophobic and hydrophilic c-Si by a combination of QSSPC, CV, XPS and FTIRProceedings paperhttp://www.sciencedirect.com/science/article/pii/S1876610212012891