Franco, JacopoJacopoFrancoKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroeseneken2021-10-222021-10-2220140167-9317https://imec-publications.be/handle/20.500.12860/23829Poly-Si heaters for ultra-fast local temperature control of on-wafer test structuresJournal articlehttp://dx.doi.org/10.1016/j.mee.2013.09.013