Contactless fault isolation of ultra low k dielectrics in soft breakdown condition

Herfurth, NorbertNorbertHerfurthWu, ChenChenWuDe Wolf, IngridIngridDe WolfCroes, KristofKristofCroesBoit, ChristianChristianBoit2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30876Contactless fault isolation of ultra low k dielectrics in soft breakdown conditionProceedings paperhttps://ieeexplore.ieee.org/document/8452487