Two dimensional electrical characterization of semiconductor devices under high vacuum conditions

Eyben, PierrePierreEybenPolspoel, WouterWouterPolspoelMody, JayJayModyVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12140Two dimensional electrical characterization of semiconductor devices under high vacuum conditionsMeeting abstract