Kwon, Hak-YongHak-YongKwonKim, Jeon-HoJeon-HoKimKim, Young-HoonYoung-HoonKimKim, Young-JaeYoung-JaeKimKim, Dae-YounDae-YounKimChoi, Seung-WooSeung-WooChoiPark, Hyung-SangHyung-SangParkYoo, Yong-MinYong-MinYooThangaraju, SarasvathiSarasvathiThangarajuRedolfi, AugustoAugustoRedolfiTravaly, YoussefYoussefTravalySwinnen, BartBartSwinnenBeynet, JulienJulienBeynet2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17419Plasma enhanced atomic layer deposition of silicon oxide for through silicon viaProceedings paperhttp://ald2010.snu.ac.kr/