Tomida, KazuyukiKazuyukiTomidaHiraga, KeizoKeizoHiragaDehan, MorinMorinDehanHellings, GeertGeertHellingsJang, DoyoungDoyoungJangMiyaguchi, KenichiKenichiMiyaguchiChiarella, ThomasThomasChiarellaKim, Min-SooMin-SooKimMocuta, AndaAndaMocutaHoriguchi, NaotoNaotoHoriguchiMercha, AbdelkarimAbdelkarimMerchaVerkest, DiederikDiederikVerkestThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/26002Impact of fin shape variability on device performance towards 10nm nodeProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7165884