Modal analysis based equivalent circuit model and its verification for a single cMUT cell

Mao, ShengpingShengpingMaoRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochusCzarnecki, PiotrPiotrCzarneckiHelin, PhilippePhilippeHelinSeveri, SimoneSimoneSeveriNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmans2021-10-242021-10-2420170960-1317https://imec-publications.be/handle/20.500.12860/28913Modal analysis based equivalent circuit model and its verification for a single cMUT cellJournal articlehttp://iopscience.iop.org/article/10.1088/1361-6439/aa53ce/meta