Brongersma, SywertSywertBrongersmaVervoort, IwanIwanVervoortJudelewicz, MosheMosheJudelewiczBender, HugoHugoBenderConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstBeyer, GeraldGeraldBeyerRichard, EmmanuelEmmanuelRichardPalmans, RogerRogerPalmansLagrange, SébastienSébastienLagrangeMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3280Non-correlated behavior of sheet resistance and stress during self-annealing of electroplated copperProceedings paper