Growth mechanism of h-BN nanowalls deposited by unbalanced RF sputtering

Hoang, Duc-QuangDuc-QuangHoangJanssens, StoffelStoffelJanssensPobedinskas, PauliusPauliusPobedinskasRuttens, BartBartRuttensD'Haen, JanJanD'HaenHaenen, KenKenHaenen2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23941Growth mechanism of h-BN nanowalls deposited by unbalanced RF sputteringOral presentationhttp://mrsspring14.zerista.com/event/member/112160