CMOS compatible silicon etched V-grooves integrated with a SOI fiber coupling technique for enhancing fiber-to-chip alignment

Galan, V.J.V.J.GalanSanchis, P.P.SanchisMarti, J.J.MartiMarx, S.S.MarxSchröder, H.H.SchröderMurhopadhyay, B.B.MurhopadhyayTekin, T.T.TekinSelvaraja, ShankarShankarSelvarajaBogaerts, WimWimBogaertsDumon, PieterPieterDumonZimmerman, L.L.Zimmerman2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15325CMOS compatible silicon etched V-grooves integrated with a SOI fiber coupling technique for enhancing fiber-to-chip alignmentProceedings paper