The impact of plasma-charging damage on the RF performance of deep-submicron MOSFET

Pantisano, LuigiLuigiPantisanoCheung, K. P.K. P.CheungRoussel, PhilippePhilippeRousselPaccagnella, A.A.Paccagnella2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6692The impact of plasma-charging damage on the RF performance of deep-submicron MOSFETJournal article