Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2S

Groven, BenjaminBenjaminGrovenHeyne, MarkusMarkusHeyneNalin Mehta, AnkitAnkitNalin MehtaBender, HugoHugoBenderNuytten, ThomasThomasNuyttenMeersschaut, JohanJohanMeersschautConard, ThierryThierryConardVerdonck, PatrickPatrickVerdonckVan Elshocht, SvenSvenVan ElshochtVandervorst, WilfriedWilfriedVandervorstDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsRadu, IulianaIulianaRaduCaymax, MattyMattyCaymaxDelabie, AnneliesAnneliesDelabie2021-10-242021-10-2420170897-4756https://imec-publications.be/handle/20.500.12860/28424Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2SJournal articlehttp://pubs.acs.org/doi/abs/10.1021/acs.chemmater.6b05214