In-line electrical characterization of furnace and plasma and plasma nitrided gate dielectric films

Eason, K.K.EasonPassefort, SophieSophiePassefortZhang, X.X.ZhangCubaynes, FlorenceFlorenceCubaynesSchaekers, MarcMarcSchaekers2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6299In-line electrical characterization of furnace and plasma and plasma nitrided gate dielectric filmsOral presentation