FIB repair of reticle defects with antistaining-effects on optical lithography from G-line to DUV

Prewett, P. D.P. D.PrewettMartin, B.B.MartinWatson, J. G.J. G.WatsonEastwood, A. W.A. W.EastwoodJonckheere, RikRikJonckheere2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/301FIB repair of reticle defects with antistaining-effects on optical lithography from G-line to DUVJournal article