Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom

Serrano, J. J.J. J.SerranoBlanco, J. M.J. M.BlancoGuzman, B.B.GuzmanDe Witte, HildeHildeDe WitteVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5647Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atomJournal article