The influence of the package environment on the functioning and reliability of RF-MEMS switches

van Spengen, MerlijnMerlijnvan SpengenCzarnecki, PiotrPiotrCzarneckiPuers, BobBobPuersvan Beek, Joost T.M.Joost T.M.van BeekDe Wolf, IngridIngridDe Wolf2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11437The influence of the package environment on the functioning and reliability of RF-MEMS switchesProceedings paper