Extreme contact shrink for back end of line connectivity

Schleicher, FilipFilipSchleicherPaolillo, SaraSaraPaolilloDecoster, StefanStefanDecosterWu, ChenChenWuVega Gonzalez, VictorVictorVega GonzalezHasan, MahmudulMahmudulHasanBeral, ChristopheChristopheBeralLazzarino, FredericFredericLazzarino2022-06-282022-05-292022-05-302022-06-282022-05-102166-2746WOS:000795700400001https://imec-publications.be/handle/20.500.12860/39901Extreme contact shrink for back end of line connectivityJournal article10.1116/6.0001757WOS:000795700400001Materials scienceBEOLdry etchshrinkviacontact hole