Elst, KathyKathyElstVandervorst, WilfriedWilfriedVandervorstBender, HugoHugoBenderAlay, Josep LluisJosep LluisAlay2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/149Study of the altered layer formation under oxygen bombardment in combination with floodingProceedings paper