Particle removal from micrometer-sized trenches using high-velocity-aerosol cleaning and comparison with megasonic tank cleaning

Wostyn, KurtKurtWostynSano, Ken-IchiKen-IchiSanoEitoku, A.A.EitokuJanssens, TomTomJanssensBearda, TwanTwanBeardaLeunissen, PeterPeterLeunissenMertens, PaulPaulMertens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13234Particle removal from micrometer-sized trenches using high-velocity-aerosol cleaning and comparison with megasonic tank cleaningProceedings paper