Demuynck, StevenStevenDemuynckKim, HonggunHonggunKimHuffman, CraigCraigHuffmanDarnon, MaximeMaximeDarnonStruyf, HerbertHerbertStruyfVersluijs, JankoJankoVersluijsClaes, MartineMartineClaesVereecke, GuyGuyVereeckeVerdonck, PatrickPatrickVerdonckVolders, HennyHennyVoldersHeylen, NancyNancyHeylenKellens, KristofKristofKellensDe Roest, DavidDavidDe RoestSprey, HesselHesselSpreyBeyer, GeraldGeraldBeyer2021-10-172021-10-1720090021-4922https://imec-publications.be/handle/20.500.12860/15222Dielectric reliability of 50nm half pitch structures in Aurora® LKJournal articlehttp://jjap.ipap.jp/link?JJAP/48/04C018/pdf