Brijs, BertBertBrijsDeleu, JeroenJeroenDeleuStorm, WolfgangWolfgangStormDe Coster, WalterWalterDe CosterVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1105Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-inJournal article