Souriau, LaurentLaurentSouriauRadisic, DunjaDunjaRadisicKundu, ShreyaShreyaKunduParaschiv, VasileVasileParaschivYamashita, FumikoFumikoYamashitaFujimoto, KiwamuKiwamuFujimotoTahara, ShigeruShigeruTaharaMaeda, K.K.MaedaKim, WoojinWoojinKimRao, SiddharthSiddharthRaoDonadio, Gabriele LucaGabriele LucaDonadioCrotti, DavideDavideCrottiTsvetanova, DianaDianaTsvetanovaSwerts, JohanJohanSwertsMertens, SofieSofieMertensLin, TsannTsannLinCouet, SebastienSebastienCouetPiumi, DanieleDanielePiumiKar, Gouri SankarGouri SankarKarFurnemont, ArnaudArnaudFurnemont2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27338Magnetic tunnel junctions etch and encapsulation process optimization for high-density STT-MRAM applicationsMeeting abstract