Compensating differences between measurement and calibration wafer in probe-tip calibrations

Carchon, GeertGeertCarchonSchreurs, DominiqueDominiqueSchreursVandenberghe, S.S.VandenbergheNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe Raedt2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2432Compensating differences between measurement and calibration wafer in probe-tip calibrations - deembedding of line parametersProceedings paper