Mallik, ArindamArindamMallikHoriguchi, NaotoNaotoHoriguchiBoemmels, JuergenJuergenBoemmelsThean, AaronAaronTheanBarla, KathyKathyBarlaVandenberghe, GeertGeertVandenbergheRonse, KurtKurtRonseRyckaert, JulienJulienRyckaertMercha, AbdelkarimAbdelkarimMerchaAltimime, LaithLaithAltimimeVerkest, DiederikDiederikVerkestSteegen, AnAnSteegen2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24192The economic impact of EUV lithography on critical process modulesProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1864011