Vaisman Chasin, AdrianAdrianVaisman ChasinBury, ErikErikBuryFranco, JacopoJacopoFrancoKaczer, BenBenKaczerRzepa, GerhardGerhardRzepaPutcha, VamsiVamsiPutchaWeckx, PieterPieterWeckxRitzenthaler, RomainRomainRitzenthalerMertens, HansHansMertensHoriguchi, NaotoNaotoHoriguchiLinten, DimitriDimitriLinten2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31998Reliability in stacked Gate-All-Around Si nanowire devices: time dependent variability and full degradation mappingProceedings paper