Mathur, R.R.MathurBhargava, M.M.BhargavaCline, B.B.ClineSalahuddin, Shairfe MuhammadShairfe MuhammadSalahuddinGupta, AnshulAnshulGuptaSchuddinck, PieterPieterSchuddinckRyckaert, JulienJulienRyckaertKulkarni, J.P.J.P.Kulkarni2023-06-202023-06-202023-06-2020220018-9383WOS:000751496100001https://imec-publications.be/handle/20.500.12860/41927Buried Interconnects for Sub-5 nm SRAM DesignJournal article10.1109/TED.2022.3143078WOS:000751496100001