ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors

Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzThijs, StevenStevenThijsHaspeslagh, LucLucHaspeslaghWitvrouw, AnnAnnWitvrouwVan Hoof, ChrisChrisVan HoofGroeseneken, GuidoGuidoGroesenekenDe Wolf, IngridIngridDe Wolf2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14418ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrorsProceedings paper