Lenk, ClaudiaClaudiaLenkKrivoshapkina, YanaYanaKrivoshapkinaHofmann, MartinMartinHofmannLenk, SteveSteveLenkTzvetan, IvanovIvanovTzvetanRangelow, IvoIvoRangelowAhmad, AhmadAhmadAhmadReum, AlexanderAlexanderReumHolz, MMHolzGlinsner, ThomasThomasGlinsnerEibelhuber, MartinMartinEibelhuberTreiblmayr, DominikDominikTreiblmayrSchamberger, BarbaraBarbaraSchambergerChan, BTBTChanEl Otell, ZiadZiadEl Otellde Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-272021-10-2720191071-1023https://imec-publications.be/handle/20.500.12860/33402High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technologyJournal articlehttps://doi.org/10.1116/1.5067269