Low track height standard-cells enable high-placement density and low-BEOL cost

Debacker, PeterPeterDebackerMattii, LucaLucaMattiiSherazi, YasserYasserSheraziBaert, RogierRogierBaertGerousis, VassiliosVassiliosGerousisNauts, ClaireClaireNautsRaghavan, PraveenPraveenRaghavanRyckaert, JulienJulienRyckaertKim, Ryan Ryoung hanRyan Ryoung hanKimVerkest, DiederikDiederikVerkest2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28186Low track height standard-cells enable high-placement density and low-BEOL costProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2626124