Lateral and vertical scaling of a QSA HBT for a 0.13μm 200GHz SiGe:C BiCMOS technology

Van Huylenbroeck, StefaanStefaanVan HuylenbroeckSibaja-Hernandez, ArturoArturoSibaja-HernandezPiontek, AndreasAndreasPiontekChoi, Li JenLi JenChoiXu, MingweiMingweiXuOuassif, NordinNordinOuassifVleugels, FrankFrankVleugelsVan Wichelen, KoenKoenVan WichelenWitters, LiesbethLiesbethWittersKunnen, EddyEddyKunnenLeray, PhilippePhilippeLerayDevriendt, KatiaKatiaDevriendtShi, XiaopingXiaopingShiLoo, RogerRogerLooDecoutere, StefaanStefaanDecoutere2021-10-152021-10-152004-09https://imec-publications.be/handle/20.500.12860/9764Lateral and vertical scaling of a QSA HBT for a 0.13μm 200GHz SiGe:C BiCMOS technologyProceedings paper