Lauwers, AnneAnneLauwersKittl, JorgeJorgeKittlVan Dal, MarkMarkVan DalChamirian, OxanaOxanaChamirianLindsay, RichardRichardLindsayde Potter de ten Broeck, MurielMurielde Potter de ten BroeckDemeurisse, CarolineCarolineDemeurisseVrancken, ChristaChristaVranckenMaex, KarenKarenMaex2021-10-152021-10-152004-11https://imec-publications.be/handle/20.500.12860/9183Low temperature spike anneal for Ni-Silicide formationJournal article