Zhang, LipingLipingZhangde Marneffe, Jean-FrancoisJean-Francoisde MarneffeHeylen, NancyNancyHeylenMurdoch, GayleGayleMurdochTokei, ZsoltZsoltTokeiBoemmels, JuergenJuergenBoemmelsDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-2320150003-6951https://imec-publications.be/handle/20.500.12860/26239Damage free integration of ultralow-k dielectrics by template replacement approachJournal articlehttp://scitation.aip.org/content/aip/journal/apl/107/9/10.1063/1.4930072