Nag, ManojManojNagSteudel, SoerenSoerenSteudelVaisman Chasin, AdrianAdrianVaisman ChasinMyny, KrisKrisMynyRockele, MaartenMaartenRockeleBhoolokam, AjayAjayBhoolokamWillegems, MyriamMyriamWillegemsSmout, SteveSteveSmoutVicca, PeterPeterViccaAmeys, MarcMarcAmeysSchols, SarahSarahScholsGenoe, JanJanGenoeGroeseneken, GuidoGuidoGroesenekenHeremans, PaulPaulHeremans2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22842Back-channel-etch process flow for a-IGZO TFTsProceedings paperhttp://onlinelibrary.wiley.com/doi/10.1002/sdtp.83/abstract