Photoluminescent ZnS:Cu phosphor films made with Atomic Layer Chemical Vapor Deposition and Thermal Evaporation

Hikavyy, A.A.HikavyyNeyts, K.K.NeytsStuyven, G.G.StuyvenPoelman, D.D.PoelmanDe Visschere, PatrickPatrickDe Visschere2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3514Photoluminescent ZnS:Cu phosphor films made with Atomic Layer Chemical Vapor Deposition and Thermal EvaporationProceedings paper