Alves Donaton, RicardoRicardoAlves DonatonIacopi, FrancescaFrancescaIacopiBaklanov, MikhaïlMikhaïlBaklanovShamiryan, DenisDenisShamiryanCoenegrachts, BartBartCoenegrachtsStruyf, HerbertHerbertStruyfLepage, MurielMurielLepageMeuris, MarcMarcMeurisVan Hove, MarleenMarleenVan HoveGray, WilliamWilliamGrayMeynen, HermanHermanMeynenDe Roest, DavidDavidDe RoestVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4345Physical and electrical characterization of silsesquioxane-based ultra-low k dielectric filmsProceedings paper