Peto, G.G.PetoMolnar, G.G.MolnarKotai, E.E.KotaiDezsi, I.I.DezsiKarlsteen, M.M.KarlsteenSödervall, U.U.SödervallWillander, M.M.WillanderCaymax, MattyMattyCaymaxLoo, RogerRogerLoo2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5568Formation of epitaxial CoSi2 film on Si1-xGex(100) by reactive deposition epitaxy of Co1-xTix layerOral presentation