Berghmans, BartBartBerghmansVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-1720090021-8979https://imec-publications.be/handle/20.500.12860/14979The effect of oxygen during irradiation of silicon with low energy Cs+ ionsJournal articlehttp://link.aip.org/link/?JAP/106/033509