Phung, QuanQuanPhungPourtois, GeoffreyGeoffreyPourtoisSwerts, JohanJohanSwertsPierloot, ChristineChristinePierlootDelabie, AnneliesAnneliesDelabie2021-10-222021-10-2220151932-7447https://imec-publications.be/handle/20.500.12860/25760Atomic layer deposition of ruthenium on ruthenium surfaces: a theoretical studyJournal articlehttp://pubs.acs.org/doi/abs/10.1021/jp5125958