Reference-free, depth dependent characterization of nanoscale materials by combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis

Hoenicke, PhilippPhilippHoenickeMueller, MatthiasMatthiasMuellerDetlefs, BlankaBlankaDetlefsFleischmann, ClaudiaClaudiaFleischmannBeckhoff, BurkhardBurkhardBeckhoff2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23946Reference-free, depth dependent characterization of nanoscale materials by combined X-ray reflectivity and grazing incidence X-ray fluorescence analysisMeeting abstract