Process tolerant design of a BAW resonator via acoustic metamaterial engineering

Figeys, BrunoBrunoFigeysNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22344Process tolerant design of a BAW resonator via acoustic metamaterial engineeringProceedings paper