Bearda, TwanTwanBeardaMertens, PaulPaulMertensHeyns, MarcMarcHeynsWoerlee, P.P.WoerleeWallinga, H.H.Wallinga2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4100Breakdown and recovery of thin gate oxidesProceedings paper