Lifetime and leakage current studies in shallow p-n junctions fabricated in a high-energy boron implanted p-well

Poyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysRooyackers, RitaRitaRooyackersBadenes, GonçalGonçalBadenesGaubas, EugenijusEugenijusGaubas2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4676Lifetime and leakage current studies in shallow p-n junctions fabricated in a high-energy boron implanted p-wellProceedings paper