Electrical characterization, modeling and reliability analysis of a via last TSV

Majeed, BivraghBivraghMajeedSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanVandevelde, BartBartVandeveldeDuval, FabriceFabriceDuvalSoussan, PhilippePhilippeSoussanBeyne, EricEricBeyne2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17555Electrical characterization, modeling and reliability analysis of a via last TSVProceedings paper